JPH0124242B2 - - Google Patents

Info

Publication number
JPH0124242B2
JPH0124242B2 JP5406782A JP5406782A JPH0124242B2 JP H0124242 B2 JPH0124242 B2 JP H0124242B2 JP 5406782 A JP5406782 A JP 5406782A JP 5406782 A JP5406782 A JP 5406782A JP H0124242 B2 JPH0124242 B2 JP H0124242B2
Authority
JP
Japan
Prior art keywords
optical fiber
lens system
light
optical
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5406782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58169007A (ja
Inventor
Motoo Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP5406782A priority Critical patent/JPS58169007A/ja
Publication of JPS58169007A publication Critical patent/JPS58169007A/ja
Publication of JPH0124242B2 publication Critical patent/JPH0124242B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Measurement Of Optical Distance (AREA)
JP5406782A 1982-03-31 1982-03-31 光学式位置測定装置 Granted JPS58169007A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5406782A JPS58169007A (ja) 1982-03-31 1982-03-31 光学式位置測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5406782A JPS58169007A (ja) 1982-03-31 1982-03-31 光学式位置測定装置

Publications (2)

Publication Number Publication Date
JPS58169007A JPS58169007A (ja) 1983-10-05
JPH0124242B2 true JPH0124242B2 (en]) 1989-05-10

Family

ID=12960268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5406782A Granted JPS58169007A (ja) 1982-03-31 1982-03-31 光学式位置測定装置

Country Status (1)

Country Link
JP (1) JPS58169007A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61186804A (ja) * 1985-02-11 1986-08-20 ゼロツクス　コーポレーシヨン 光検出装置
JPH067399B2 (ja) * 1985-05-20 1994-01-26 松下電器産業株式会社 光音響センサ
JPH063639B2 (ja) * 1985-05-20 1994-01-12 松下電器産業株式会社 光・音響センサ
EP0608448A1 (de) * 1993-01-26 1994-08-03 International Business Machines Corporation Verfahren und Vorrichtung zur Positionsbestimmung

Also Published As

Publication number Publication date
JPS58169007A (ja) 1983-10-05

Similar Documents

Publication Publication Date Title
US3589815A (en) Noncontact measuring probe
US5118956A (en) Touch probe including a waveguide
JPS6379004A (ja) 形状測定用光プロ−ブ
JP7217009B2 (ja) 内径測定装置
EP0234562A2 (en) Displacement sensor
JP3947159B2 (ja) 共焦点光学結像原理に従って迅速な光学的距離測定を行うセンサ装置
US5011287A (en) Interferometer object position measuring system and device
US5033845A (en) Multi-direction distance measuring method and apparatus
US6285451B1 (en) Noncontacting optical method for determining thickness and related apparatus
JPH0124242B2 (en])
US3552857A (en) Optical device for the determination of the spacing of an object and its angular deviation relative to an initial position
CN208588825U (zh) 激光雷达、自主移动机器人及智能车辆
JPS58169008A (ja) 光学式位置測定装置
CN110202414B (zh) 一种基于光学倏逝波的非接触式高精度对刀系统
JP3200927B2 (ja) 被覆状態測定方法及び装置
KR100240259B1 (ko) 원통 렌즈와 레이저 스캐너를 이용한 3차원 측정장치
JPS6334963B2 (en])
JPH06258040A (ja) レーザー変位計
JPS58169006A (ja) 光学式位置測定装置
JP2001249010A (ja) 板状のワークの表面形状と板厚の測定方法および測定装置
JPH0357914A (ja) 光学式プローブ
SU1024709A1 (ru) Устройство дл контрол неплоскостности
SU1379610A1 (ru) Сферометр
JPH0425611Y2 (en])
JP2523334B2 (ja) 光学式変位計